G. S. Mathad

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Books

Plasma Etching Processes for Sub-quarter Micron Devices

Plasma Etching Processes for Sub-quarter Micron Devices

Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics

Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics

G. S. Mathad, Harzara S. Rathore

Thin Film Materials, Processes, and Reliability

Thin Film Materials, Processes, and Reliability

Electrochemical Society. Electronics Division, G. S. Mathad

Interconnect and Contact Metallization for ULSI

Interconnect and Contact Metallization for ULSI

G. S. Mathad, Hamir Singh Rathore, Harzara S. Rathore, Y. Arita

Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control

Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control

G. S. Mathad, Yasuhiro Horiike

Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics II

Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics II

G. S. Mathad, Electrochemical Society. Electrodeposition Division, Electrochemical Society. Dielectric Science and Technology Division

Copper Interconnects, New Contact Metallurgies, Structures, and Low-k Interlevel Dielectrics

Copper Interconnects, New Contact Metallurgies, Structures, and Low-k Interlevel Dielectrics

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