Julian W. Gardner

Florin Udrea

Essential update on the development of new processing, packaging and assembly methodologies for microsensor devices, with new coverage on ‘system on a chip’ and ‘laboratory on a chip’ The miniaturisation of sensors has been made possible by advances in the technologies originating in the semiconductor industry, and the emergent field of microsensors has grown rapidly over the past ten years. This book updates the successful first edition (published in 1994) to cover the fundamental principles, developments and applications of microsensors. Two new chapters will be included and will provide coverage of both CMOS device processing technologies and smart sensors, in particular BioMEMS and the system-on-chip, lab-on-a-chip, and noise-on-a-chip. Other new sections will update the treatment of optical and magnetic sensors, MOEMS and smart sensor interfacing. Worked examples will be included to illustrate key processes and applications. The end-of-chapter problems will be revised and updated. This is an increasingly important area of research and development. Microsensors are a growing aspect of Microelectronics courses at final year undergraduate and postgraduate level. A thorough update of the well-received first edition is timely. Provides a timely update of a classic reference on this increasingly important field Presents an introduction to sensors and measurement systems and the processing of materials for microsensor fabrication Comprehensive coverage of thermal, magnetic, optical, mechanical, chemical and biological microsensors Updated sections highlighting the development of new processing, packaging and assembly methodologies for microsensor devices New chapter charting the evolution of the smart sensor and microsystem, with coverage of ‘system on a chip’ and ‘laboratory on a chip’

Principles and Applications

Microsensors

Vijay K. Varadan

Osama O. Awadelkarim

Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

Microsensors, MEMS, and Smart Devices

Tim C. Pearce

Susan S. Schiffman

H. Troy Nagle

"Electronic noses" are instruments which mimic the sense of smell. Consisting of olfactory sensors and a suitable signal processing unit, they are able to detect and distinguish odors precisely and at low cost. This makes them very useful for a remarkable variety of applications in the food and pharmaceutical industry, in environmental control or clinical diagnostics and more. The scope covers biological and technical fundamentals and up-to-date research. Contributions by renowned international scientists as well as application-oriented news from successful "e-nose" manufacturers give a well-rounded account of the topic, and this coverage from R&D to applications makes this book a must-have read for e-nose researchers, designers and users alike.

Electronic Nose Technology

Handbook of Machine Olfaction

Julian W. Gardner

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