Masayoshi Esashi

Zhaoying Zhou

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China

ICO20

3D and Circuit Integration of MEMS Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.

3D and Circuit Integration of MEMS

Masaaki Sato

Keizo Ishii

Noriaki Ohuchi

Noriko Osumi

Takami Yamaguchi

Combining engineering and medicine research projects with biological applications, the contributions in this volume constitute the efforts of both distinguished scientists and young investigators in various fields of biomedical engineering at Tohoku University, one of Japan's leading scientific research universities. The Tohoku University 21st Century COE Program “Future Medical Engineering Based on Bionanotechnology” is — out of 113 programmes chosen by the Ministry of Education, Culture, Sports, Science and Technology in 2002 – the only one program devoted to biomedical engineering. This book comprises the proceedings of the final closing symposium to be held in January 2007, and summarizes all the efforts of the program in a comprehensive manner. In total, more than 100 authors from the engineering and medical schools of Tohoku University have contributed to this volume, through which readers can understand all the research results carried out under the umbrella of the program. Contents:Cellular Function and Molecular Operation:Progress of Our Research in Auditory Mechnaics (H Wada)Generation of Stable Chinese Hamster Ovary Cell Lines Expressing the Motor Protein Prestin (K Iida et al.)Protection of Outer Hair Cells from Traumatic Noise by Conditioning with Heat Stress (M Murakoshi et al.)Time-Lapse Observation of Neural Epithelium Cell Behavior in Slice Culture (N Nakamura et al.)Nano-Medicine:Development of Novel Medical Engineering Using Micro-Nanomachining (M Esashi)Biomimetic Artificial Myocardium Using Nano Technology (T Yambe)MEMS-Based Fuel Cell for Portable Medical Applications (K-B Min et al.)Lithium Niobate Bulk Micromachining for Medical Sensors (A Randles et al.)Imaging of the Biological Molecule and Structure:Brain Imaging of Quality of Life Using Positron Emission Tomography (M Itoh & M Tashiro)Human Brain Metabolic Changes Induced by Actual Car-Driving (M Jeong et al.)Automatic Medical Image Registration Using Mutual Information (K Kumagai et al.)The Comparison of Brain Structure Between Exercised and Non-Exercised Students (H Sensui et al.)Medical Informatics:Computational Approaches to Hemodynamics Analysis from Micro to Macro Scales (T Yamaguchi)A Fluid-Solid Interaction Study of the Pulse Wave Velocity in Uniform Arteries (T Fukui et al.)CFD Tools in Engineering Design Studies and Medical Sciences (P S Kulkarni)Evaluation of an Index for Cardiac Function During Assitance with a Rotary Blood Pump (D Ogawa et al.)and other papers Readership: Postgraduate students and researchers in biomedical engineering. Keywords:Biomedical Engineering;Cell Biology;Biomechanics;Bionanotechnology;Nanomedicine;Medical Imaging;Computational Medicine;Simulation MedicineKey Features:The first compilation of bionanotechnology-based biomedical engineering research in Tohoku University, which is one of the most active biomedical engineering-oriented universities in JapanUnique combinations and collaborations of researchers from various fields of science and technology, thus enabling truly interdisciplinary researchContributions from young investigators with PhD degrees, who are promoted by the Programme and are usually inaccessible for ordinary publications

Future Medical Engineering Based on Bionanotechnology

Combining engineering and medicine research projects with biological applications, the contributions in this volume constitute the efforts of both distinguished scientists and young investigators in various fields of biomedical engineering at Tohoku University, one of Japan''s leading scientific research universities. The Tohoku University 21st Century COE Program OC Future Medical Engineering Based on BionanotechnologyOCO is OCo out of 113 programmes chosen by the Ministry of Education, Culture, Sports, Science and Technology in 2002 OCo the only one program devoted to biomedical engineering. This book comprises the proceedings of the final closing symposium to be held in January 2007, and summarizes all the efforts of the program in a comprehensive manner. In total, more than 100 authors from the engineering and medical schools of Tohoku University have contributed to this volume, through which readers can understand all the research results carried out under the umbrella of the program. Sample Chapter(s). Chapter 1: An Electrochemical Microsystem for Manipulating Living Cells (910 KB). Contents: Cellular Function and Molecular Operation: Progress of Our Research in Auditory Mechnaics (H Wada); Generation of Stable Chinese Hamster Ovary Cell Lines Expressing the Motor Protein Prestin (K Iida et al.); Protection of Outer Hair Cells from Traumatic Noise by Conditioning with Heat Stress (M Murakoshi et al.); Time-Lapse Observation of Neural Epithelium Cell Behavior in Slice Culture (N Nakamura et al.); Nano-Medicine: Development of Novel Medical Engineering Using Micro-Nanomachining (M Esashi); Biomimetic Artificial Myocardium Using Nano Technology (T Yambe); MEMS-Based Fuel Cell for Portable Medical Applications (K-B Min et al.); Lithium Niobate Bulk Micromachining for Medical Sensors (A Randles et al.); Imaging of the Biological Molecule and Structure: Brain Imaging of Quality of Life Using Positron Emission Tomography (M Itoh & M Tashiro); Human Brain Metabolic Changes Induced by Actual Car-Driving (M Jeong et al.); Automatic Medical Image Registration Using Mutual Information (K Kumagai et al.); The Comparison of Brain Structure Between Exercised and Non-Exercised Students (H Sensui et al.); Medical Informatics: Computational Approaches to Hemodynamics Analysis from Micro to Macro Scales (T Yamaguchi); A Fluid-Solid Interaction Study of the Pulse Wave Velocity in Uniform Arteries (T Fukui et al.); CFD Tools in Engineering Design Studies and Medical Sciences (P S Kulkarni); Evaluation of an Index for Cardiac Function During Assitance with a Rotary Blood Pump (D Ogawa et al.); and other papers. Readership: Postgraduate students and researchers in biomedical engineering."

Proceedings of the Final Symposium of the Tohoku University 21st Century Center of Excellence Program, Sendai International Center, Japan 7-9 January 2007

Masayoshi Esashi

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