Sunan Huang

Kok K. Tan

Tong H. Lee

Huifang Dou

Precision manufacturing is a development that has been gathering momentum over the last century and accelerating over the last 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), Coordinate Measuring Machines (CMMs) and precision metrology systems (e.g., Scanning Probe Microscopy (SPM)), and robot/machine tools to carry out micro-assembly (e.g., MEMS) and delicate short wavelength laser processes. As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This book is focused on these aspects of precision engineering. It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials.

Design and Implementation

Precision Motion Control

Kok Kiong Tan

Poi Voon Er

Tong Heng Lee

Control systems include many components, such as transducers, sensors, actuators and mechanical parts. These components are required to be operated under some specific conditions. However, due to prolonged operations or harsh operating environment, the properties of these devices may degrade to an unacceptable level, causing more regular fault occurrences. It is therefore necessary to diagnose faults and provide the fault-accommodation control which compensates for the fault of the component by substituting a configuration of redundant elements so that the system continues to operate satisfactorily. In this book, we present a result of several years of work in the area of fault diagnosis and fault-accommodation control. It aims at information estimate methods when faults occur. The book uses the model built from the plant or process, to detect and isolate failures, in contrast to traditional hardware or statistical technologies dealing with failures. It presents model-based learning and design technologies for fault detection, isolation and identification as well as fault-tolerant control. These models are also used to analyse the fault detectability and isolability conditions and discuss the stability of the closed-loop system. It is intended to report new technologies in the area of fault diagnosis, covering fault analysis and control strategies of design for various applications. The book addresses four main schemes: modelling of actuator or sensor faults; fault detection and isolation; fault identification, and fault reconfiguration (accommodation) control. It also covers application issues in the monitoring control of actuators, providing several interesting case studies for more application-oriented readers.

Intelligent Fault Diagnosis and Accommodation Control

Sunan Huang

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