Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes Joint Proceedings of Symposia On: ALTEC 2003 : Analytical Techniques for Semiconductor Materials and Process Characterization IV : Paris, France ; and the 202nd Meeting of the Electrochemical Society : Diagnostic Techniques for Semiconductor Materials and Devices VI : Salt Lake City, Utah
.".. ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.