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Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 7

Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 7

F. Roozeboom, P. J. Timans, K. Kakushima, Z. Karim, S. De Gendt, H. Jagannathan, E. P. Gusev — 2017

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