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Smart Sensors, Actuators, and MEMS

Smart Sensors, Actuators, and MEMS 19-21 May 2003, Maspalomas, Gran Canaria, Spain

Society of Photo-optical Instrumentation Engineers, V. K. Varadan, Jung-Chih Chiao, Carles Cané, Universidad de Las Palmas de Gran Canaria — 2003

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