Rüdiger Quay, Stefano Leone, Jana Ligl, Christian Manz, Lutz Kirste, Theodor Fuchs, Hanspeter Menner, Mario Prescher, Joachim Wiegert, Agne Zukauskaite, Oliver Ambacher

Metal-lorganic Chemical Vapor Deposition of Aluminum Scandium Nitride

Rüdiger Quay, Stefano Leone, Jana Ligl, Christian Manz, Lutz Kirste, Theodor Fuchs, Hanspeter Menner, Mario Prescher, Joachim Wiegert, Agne Zukauskaite, Oliver Ambacher — 2020

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